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Vacuum Chambers and Components
Vacuum Chambers and Components Data Sheets
Vacuum chambers and components are specialized vessels that can maintain a high vacuum process environment for manufacturing thin films, microelectronics, optics and materials.
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Learn More About Vacuum Chambers and Components
Vacuum Chambers and Components DataSheets From:
Headquarters
MKS Instruments, Inc.
Andover, MA
Terra Universal, Inc.
Fullerton, CA
Vacuum Research Corporation
Pittsburgh, PA
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View Datasheets by Spec
Aluminum
Baseplate
Bell Jar
Box / Degassing Chamber
Feedthrough Collar
Medium (< 1, >10
-3
torr)
Plastic
Rough / Low (< 760, > 1 torr)
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