About Vacuum Controllers
Vacuum controllers monitor and control vacuum levels for process equipment such as vacuum furnaces, autoclaves, and coating machines. They provide stable and repeatable control of process chamber pressure for applications such as etching and thin-film deposition. A throttle valve and integral electronics control the pumping speed and provide consistent down-stream pressure control. The user interface consists of a digital front panel with a menu or keypad, or analog components such as knobs and switches. Computer-programmable, web-enabled, and network-ready vacuum controllers are also available. Often, these vacuum controls include a microprocessor or programmable logic controller (PLC). Vacuum controllers that interface to personal computers (PC) may include human machine interface (HMI) software or provide supervisory data acquisition and control functionality (HMI). A vacuum control that sends and receive commands via an industrial fieldbus protocol may use CANbus, SERCOS, or PROFIBUS® (PROFIBUS International).
Vacuum controllers can use linear control, limit control, PID control, feedforward control, fuzzy logic, or advanced (non-linear) controls. Linear control matches a variable input signal with a correspondingly variable control signal. Limit control is a type of on-off or bang-bang control that establishes set points or limits that, when reached, send a signal to stop or start a process variable. Proportional, integral, and derivative (PID) control requires real-time vacuum system feedback. Feedforward control provides direct-control compensation from the reference signal. Fuzzy logic is a vacuum control technique in which process variables can have imprecise values (as in partial truth) rather than a binary status (completely true or completely false). Advanced or nonlinear controls for vacuum controllers use algorithms such as neural networking and adaptive gain. Choices for vacuum controller functionality include: data logging, rate indication, and totalizing.
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Engineering Web: Vacuum Controllers
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Part Numbers for Vacuum Controllers
| Part # | Distributor | Manufacturer | Product Category | Description |
|---|---|---|---|---|
| EVBQE128 | Newark | FREESCALE SEMICONDUCTOR | Development & Emulation Too | Evaluation kit for S08 AND ColdFire V1 QE128 families of controllers; Kit Contents:EVBQE128 evaluation board, MC9S08QE128 and MCF51QE128 80-LQFP MCUs, pick-up vacuum pump, software, literature, power supply and USB cable RoHS Compliant: Yes |
| L8350320 | PLC Radwell | VARIAN | Not Provided | CONTROLLER MULTI-GAUGE LIF 80298 VACUUM |
| DP80 | PLC Radwell | SUNX LTD | Not Provided | VACUUM CONTROLLER |
| UVC1000 | PLC Radwell | EATON | Not Provided | PRESSURE CONTROLLER VACUUM GENERATOR |
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