High Vacuum Pumps

High vacuum pumps and ultrahigh vacuum pumps (UHV pumps) operate efficiently in the high vacuum region (less than 0.001 torr) and develop molecular flow, rather than physical mechanical compression, for highly evacuated systems. High vacuum levels and ultrahigh vacuum levels are used in scientific and industrial applications such as pharmaceutical preparation, degassing, semiconductor manufacturing, and molecular analysis. When selecting high vacuum pumps, configuration is an important specification to consider. Individual high vacuum pumps are designed for insertion into or use with a larger system or process. Combination pumps and multi-technology pumps can be used together for increased capacity and/or feature optimization. High vacuum pump systems and high vacuum pump stations include multiple pumps as well as piping, valves, controls, and receivers. Specifications high vacuum pump configurations include ultimate operating vacuum, pumping speed, motor power, power source, number of stages, drive type, mounting style and features.   

There are many different types of high vacuum pumps and ultrahigh vacuum pumps (UHV pumps). Turbomolecular pumps or molecular bats use a series of high-speed rotors (25,000 to 75,000 rpm) and flow stabilizing, stationary stators to impart a preferential motion to gas molecules and create molecular flow through the pump. Molecular drag pump are similar to turbomolecular pumps, but use a rotor drum with a ridged surface and cylindrical stator in place of stator and rotor blades. Hybrid pumps are available that use combinations of blades and ridged drums. Diffusion pumps and vapor pumps use jets of diffusion oil vapor to impart momentum and sweep gas molecules from the system. Cryogenic pumps and cryosorption pumps use extremely cold temperatures to trap molecules. Getter or titanium sublimation pumps (TSP) entrain gas molecules in a getter, or material that is vaporized in order to absorb or capture the molecules, and embed them on the cold outer wall of the chamber. Other unlisted, specialized or proprietary high vacuum pumps are also available. 

Mechanical pump technology and lubrication method are also important specifications to consider when searching for high vacuum pumps and ultrahigh vacuum pumps (UHV pumps). Choices for pump technology include: axial blower, centrifugal blower, circumferential piston, claw, diaphragm, gear pump, linear, liquid ring, lobed rotor, reciprocating piston, regenerative blower, rocking piston, rotary piston, rotary vane, rotary screw, and scroll. Choice for lubrication include: dry or oil-less, splash lubrication, oil-flooded, and positive pressure.

• Towards the Single Pump Solution - Recent Development in High Speed Machines for Dry Vacuum Pumping (.pdf)
  The goal of a single _dry_ pump capable of reaching high vacuum and itself exhausting to atmospheric pressure has long existed in the vacuum field. The development of a single-shaft, high-speed pump...
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• Vacuum Systems for ALD (.pdf)
  Atomic layer deposition (ALD) processes require vacuum conditions both for proper deposition and adequate purging of precursors from the chamber. Since the ALD process is surface driven, the high...
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• Vacuum Requirements for Steel Degassing (.pdf)
  Vacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are the main processes in secondary steel making. The large volumes of dissolved contaminant gases arising and the generation of metallic...
  (read more)

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Part Numbers for High Vacuum Pumps