Vacuum Pumps and Vacuum Generators

Vacuum pumps and vacuum generators provide sub-atmospheric pressure for a variety of industrial and scientific applications. Different technologies of pumps are used for industrial gripping and chucking, laboratory degassing, and purification in the fields of chemical and semiconductor processing. Vacuum handling systems are used in diverse industries such as pharmaceutical, food processing, and agricultural applications.

Types of vacuum pumps include mechanical, high and ultrahigh vacuum, and venturi jet.  A variety of mechanical compression/evacuation systems are used to produce low pressures; these typically operate most efficiently in the rough or medium vacuum range.  They are frequently used as a backing or preliminary pump for high-vacuum systems.  Mechanical types include both positive and nonpositive displacement pumps.  High and ultrahigh vacuum pumps are pumps that are efficient in the molecular flow regime and require a backing pump to operate effectively.  At very low pressure or high vacuum levels, gases act like a collection of individual molecules and pump techniques that impart a preferential momentum, reduce the mean free path or trap molecules are employed.  High vacuum pumps are utilized in thin film and semiconductor fabrication processes and on many types of analytical instruments.  Venturi or fluid jet vacuum generators rely on a flow of compressed air, gas, or liquid as the "motive" fluid to pull or create a vacuum at a desired port. They contain no moving parts and require no other power than the compressed fluid.  Common configurations for vacuum pumps and vacuum generators include individual vacuum pump, combination or multi-technology pump, and vacuum pump system or station.  An integral backing pump is a high vacuum pump system that includes a mechanical, sorption, or other backing pump to provide preliminary vacuum level for the high vacuum stage of the pump.

Vacuum specifications for vacuum pumps and vacuum generators include ultimate vacuum range, pumping speed or displacement, vacuum pump stages, and lubrication style. Vacuum is often measured in torr, or mm Hg referenced above absolute zero pressure. Sometimes the following reference terms are used: 1 torr and above: rough vacuum, 0.001 to 1.0 torr: medium vacuum, below 0.001 torr: high vacuum.  There are other terms and standards used such as medium vacuum and ultra high vacuum; consult supplier for application specifications.  The pumping speed is the air volume capacity of the vacuum pump.  Vacuum pumps are flow rated according to the volume of air exhausted with no pressure differential across the pump.  Some vacuum pumps may be used for compression of air or other gases.  Vacuum pump stages can be sequential stages of the same technology type (mechanical or Venturi), or two or more different type pumps packaged together, such as a rough, medium, and high vacuum pump system of different technologies.  Stages include single stage, two stage, three stage, and four or more stages.  Lubrication styles for vacuum pumps and vacuum generators include dry or oil-less, splash lubrication, oil-flooded, and positive pressure.

Mounting options for vacuum pumps and vacuum generators include benchtop, cart or portable, floor or skid, and permanent installation.  Applications common to vacuum pumps and vacuum generators include, general purpose and industrial, analytical and scientific, chemical and corrosive gas, food processing, manufacturing processing, medical and laboratory, packaging, power generation, pharmaceutical and sanitary, and semiconductor manufacturing.

• Vacuum and Pressure Handbook: Vacuum Pumps
  Equipment used to generate vacuum, as noted earlier, is similar to air compressors. It's even possible to generate compressed air or vacuum with the same machine, depending on how it is installed....
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• Mechnical Vacuum Pump Selection Considerations for Ion Pressure Nitriding, Plasma Nitriding and Nitro Carborising (.pdf)
  Low pressure nitriding applications typically involve the use of ammonia gas as the source of nitrogen. Careful consideration of material selection is needed for the vacuum pump system. In addition...
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Part Numbers for Vacuum Pumps and Vacuum Generators