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| Control |
Linear; PID |
| Features |
Rate Indication/ Control; Totalizing (Length or Roll Diameter) Indication/ Control |
| Interface |
Digital Front Panel; Computer Programmable |
| Inputs (inputs) |
1 |
| Type |
Serial / Digital Input |
| Notes |
100% PTFE/PFA wetted parts, highly compact, versatile |
| Abstract |
The MFC-4600 series is an ultra-compact high-precision flow · Highly compact size makes the product ideal y controller designed for use on high-purity and /or corrosive / suited for use in constrained spaces such as caustic liquids. The product consists of a miniature flow control on semiconductor wet process tools. valve and companion e lectronic control er that contains · High r eliability - Solid state e lectronic specialized PID control firmware to optimize t he vlaves controller insures extremely high MTBF. performance. Th...
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