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| Control |
Linear; PID |
| Features |
Rate Indication/ Control; Totalizing (Length or Roll Diameter) Indication/ Control |
| Interface |
Digital Front Panel; Computer Programmable |
| Inputs (inputs) |
1 |
| Type |
Serial / Digital Input |
| Notes |
High-performance, designed for use with high-purity liquids |
| Abstract |
The FlowWiz MFC-8200 Series is family of a high-performance closed-loop flow controllers designed for use in a
wide variety of high-purity liquids including DI water, harsh chemicals and CMP polishing slurries. FlowWiz is
capable of controlling flowrates from 5 cc/minute to 4 Liter/minute at +/- 3% accuracy of "setpoint" with a fast 3
second response time. Each controller module contains four primary components: Flow Meter, Flow Meter Elec-
tronics, Control Valve, and Control Valve Electronics. In operation, the user inputs a flowrate "setpoint" either FlowWiz manually...
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