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647C Pressure Controllers Data Sheets MKS Instruments, Inc.


Available from: MKS Instruments, Inc.
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647C
SPECIFICATIONS View Entire Datasheet
Control Limit; Linear (optional feature); PID
Features PLC; Multi-Function; Rate Indication/ Control
Form Factor Chassis
Interface Digital Front Panel; Computer Programmable
Inputs (inputs) 5
Notes Optional two SPDT relays per flow channel, CE compliant
View Entire Datasheet

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