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146C Pressure Controllers Data Sheets MKS Instruments, Inc.


Available from: MKS Instruments, Inc.
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146C
SPECIFICATIONS View Entire Datasheet
Control Limit; Linear (optional feature); PID
Features PLC (optional feature)
Form Factor Chassis
Interface Digital Front Panel; Computer Programmable
Inputs (inputs) 4
Notes Vacuum gauge measurement and control system, closed loop
View Entire Datasheet

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