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MKS Instruments, Inc. Data Sheets for Wafer and Thin Film Instrumentation

MKS Instruments, Inc.
Address: 2 Tech Drive
Suite 201
Andover, MA 01810
 Contact: Web site
E-mail

Phone:  (978) 645-5500
Fax: (978) 557-5100

Wafer and Thin Film Instrumentation:

Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.

Wafer and Thin Film Instrumentation: Learn more

Product Name
Notes
V/I Probe RF Impedance Analyzer -- V/I Probe RF generator / power supply probe & monitor system for plasma metrology
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  • Company Description:
    MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)