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MKS Instruments, Inc. Data Sheets for Wafer and Thin Film Instrumentation

Address:

90 Industrial Way
Wilmington, MA 01887-4610

Contact:

Web site
E-mail

Phone:	(978) 284-4000
Fax:	(978) 284-4999

Wafer and Thin Film Instrumentation:

Wafer and thin film instrumentation includes quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, and C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.

Learn more about Wafer and Thin Film Instrumentation.

Product Name	Notes
RF Impedance Analyzer -- V/I Probe®	RF generator / power supply probe & monitor system for plasma metrology

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Company Description
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat panel... (more)

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