| Product Name |
Notes |
|
Automatic Macro Inspection System -- AMI-2000
|
Automatic macro inspection system, high detection sensitivity
|
|
Automatic Macro Inspection System -- AMI-3000
|
High throughput, automatic inspection to eliminate user subjectivity
|
|
IC Wafer Inspection System -- Optistation V
|
Flexible design, allows for open cassette or SMIF applications
|
|
Overlay Measurement System -- NRM-3000
|
Overlay measurement system, active vibration-absorption stage
|
|
Overlay Measurement System -- NRM-3100
|
Waferless recipe creation, high precision optics for overlay measurement
|
|
Wafer Carrier Measuring System -- VMR-C4540
|
FOUP, FOSB, OC compatible carriers, episcopic, diascopic, darkfield
|
|
Wafer Inspection System -- Optistation 7 IC
|
Dual feeder arm transfer unit offers high throughput, non-contact alignment
|
|
Wafer Inspection System -- Optistation-3100
|
Easy operation, contamination free wafer inspection system
|
|
Wafer Inspection System -- Optistation-3200
|
Optional defect review station, high N.A. w/ longer working distances
|