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ULVAC Technologies, Inc. Data Sheets for Wafer and Thin Film Instrumentation

Address:

401 Griffin Brook Dr.
Methuen, MA 01844-1883

Contact:

Web site
E-mail

Phone:	(978) 686-7550
Fax:	(978) 689-6300

Wafer and Thin Film Instrumentation:

Wafer and thin film instrumentation includes quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, and C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.

Learn more about Wafer and Thin Film Instrumentation.

Product Name	Notes
CRTM Series -- CRTM-6000	High resolution, high speed sampling, long life span
CRTM Series -- CRTM-9000	High resolution, long life span, flexible deposition program
CRTS Series -- CRTS-0	Sensor with no water cooling pipe jacket
CRTS Series -- CRTS-12	Multi-sensor
CRTS Series -- CRTS-4	Evaporation sensor
CRTS Series -- CRTS-4U	Bakeable sensor
CRTS Series -- CRTS-6	Sputtering sensor
CRTS Series -- CRTS-6U	Sputtering sensor
CRTS Series -- CRTS-80	Sensor with no water cooling pipe jacket
ESM Series -- 1T/1AT	Provides a broad range of specs suitable for various R & D applications
LaserPIT	Applicable to broad range of materials like free-standing thinsheet or film
MESEC	Provides a broad range of specs suitable for various R & D applications
MS Series -- E1S	High temperature heating imaging system, radiant heating generates no dust
MS Series -- P1R	High temperature heating imaging system, radiant heating generates no dust
MS Series -- P44	High temperature heating imaging system, radiant heating generates no dust
MS-P44 Series	Image heating system for clean surface observation at elevated temperatures
Texture Measurement System -- Microscan	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 2000	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 2000RC	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 2000W	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 2000WRC	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 3000W	Provides a broad range of specs suitable for various R & D applications
TMS Series -- 3000WRC	Provides a broad range of specs suitable for various R & D applications

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Company Description
Founded in Japan in 1952, ULVAC is an international corporation that designs, manufacturers and markets equipment and materials for industrial applications of vacuum technology. Today, ULVAC is a leading global supplier of production systems, instrumentation, pumps and vacuum components used in the... (more)

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