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Veeco Instruments Data Sheets for Wafer and Thin Film Instrumentation

Veeco Instruments
Address: Terminal Drive
Plainview, NY 11803
 Contact: Web site
E-mail

Phone:  (805) 967-1400
(888) 248-3326
Fax: (805) 967-7717

Wafer and Thin Film Instrumentation:

Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.

Learn more about Wafer and Thin Film Instrumentation

Product Name
Notes
Optical Profiling System -- Wyko SP9900 Automated, non-contact 3D inspection for production-boosting performance
Dimension 5000 SPM Capable of measuring up to 100 areas on samples up to 350mm in diameter
Optical Profiling System -- Wyko NT9800 Continuously self-calibrating scanner for highest accuracy
Optical Profiling System -- Wyko DMEMS NT1100 Dynamic and static MEMS metrology on a single system
InSight 3DAFM Fully automated AFM system, provides fastest throughput of any AFM today
Dimension AFP Fully automated AFP, perfect for many FEOL and BEOL applications
Dimension Vx210/310 AFP Has AFM resolution, long scan capability,high vertical & lateral resolution
Innova SPM High resolution closed-loop system; fas, easy tip and sample exchange
Surface Profiler -- Dektak 150 High-performance versatility and value
Caliber SPM Ideal entry level instrument for research or industrial labs
Electrochemical SPM Scanning Probe Scope Includes ECSTM, ECAFM, SECPM, in-situ imaging with nano-scale resolution
Wyko Optical Metrology Module Interfaces easily with mechanical, electrical and data systems
Dimension 3100 Low noise performance, images small and large specimens in liquid or air
Surface Profiler -- Dektak 8 Low-force sensor technology for scratch-free measurement of soft materials
Optical Profiling System -- Wyko DMEMS NT3300 Measure in-plane and out-of-plane dimensions of MEMS motion
MultiMode V Modular design/environmental control, uses AFM and STM techniques
Optical Profiling System -- Wyko NT9100, Optical Profiling System -- Wyko NT9300 Motorized, programmable stage, comprehensive Vision® analysis software
Dimension Vx200/300 AFP Offers non-destructive profiling for CMP control, semi-automated platform
Dimension X3D for Data Storage Provides 3D metrology for 3D PMR structures and trenches, non-destructive
Dimension X Reduces etch measurement turnaround from days to mins, non-destructive
Optical Profiling System -- Wyko HD8100 Self-calibration with internal reference signal, good vibration isolation
Dimension V SPM State of the art closed-loop XYZ scanner, modular design for broad app. set
Dimension X3D Photomask Superior repeatability, high resolution, non-destructive
NanoMan VS Unmatched scanning performance, advanced software capabilities
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  • Company Description:
    Veeco is a leading provider of Metrology and Process Equipment solutions used by manufacturers in the data storage, semiconductor, wireless, lighting and solar industries. These industries help create a wide range of information age technology and products, such as portable music players, cell... (more)