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Semiconductor Products -- Proforma™ 300 Wafer and Thin Film Instrumentation Data Sheets MTI Instruments Inc.

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Semiconductor Products -- Proforma™ 300

SPECIFICATIONS

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Form Factor	ProbingSystem; Sensor or sensing element
Mounting / Loading	Manual loading
Technology	Capacitance or electromagnetic gage
Applications	Wafer
Measurements	Flatness; Roughness / Waviness; WaferThickness; Area mapping; Sorter
Notes	Wafer/part size (mm): 50, 75, 100, 125, 150, 200, 300

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