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Baratron® Absolute Manometer -- 621C01T Vacuum Gauges and Instruments Data Sheets MKS Instruments, Inc.


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Baratron® Absolute Manometer -- 621C01T
SPECIFICATIONS View Entire Datasheet
Vacuum Range (torr) 1.00 to 0.0
Accuracy (±% FS) 0.500
Operating Temperature (F) 59 to 158
Media Gas
Sensor Technology Variable Capacitance
Notes CE compliant, prevents contamination buildup, two control relays
Abstract The MKS Baratron® Type 621C Absolute Pressure Transducer is designed for applications that require a high temperature sensor. In semiconductor processes , a high temperature transducer prevents SHIELDED TRANSMISSION contamination buildup. For example, chloride-based effluents CABLES (ammonia chloride, aluminum chloride) which occur in LPCVD nitride and aluminum etch processes, can condense onto surfaces cooler than 100°C and become sources of particle generation, 4.50 4.50 (114.3) leading to wafer defects. In steam sterilizable ty...
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