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MicroPirani™ Vacuum Gauges and Instruments Data Sheets MKS Instruments, Inc.

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MicroPirani™

SPECIFICATIONS

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Vacuum Range (torr)	3000 to 1.00E-5
Operating Temperature (F)	? to 130
Media	Gas
Display Type	Digital Numerical Display (optional feature)
Sensor Technology	Semiconductor Piezoresistive
Notes	Weight 0.9 lbs, any installation orientation, for non-corrosive atmosphere

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