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MicroPirani™ Vacuum Sensors Data Sheets MKS Instruments, Inc.


Available from: MKS Instruments, Inc.
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MicroPirani™
SPECIFICATIONS View Entire Datasheet
Device Category Sensor or Transducer; Controller (optional feature)
Sensor Technology Semiconductor Piezoresistive
Vacuum Range (torr) 3001 to 7.50E-6
Pressure Measurement Absolute; Vacuum
Display Type Digital Numerical Display (optional feature)
Notes Weight 0.9 lbs, any installation orientation, for non-corrosive atmosphere
View Entire Datasheet

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