Data sheet for Baratron® Absolute Manometer -- 621C13T from MKS Instruments, Inc. on GlobalSpec

Baratron® Absolute Manometer -- 621C13T Vacuum Sensors Data Sheets MKS Instruments, Inc.

Baratron® Absolute Manometer -- 621C13T

SPECIFICATIONS

Device Category	Sensor or Transducer; Controller
Sensor Technology	Variable Capacitance
Vacuum Range (torr)	1000 to 0.0
Pressure Measurement	Absolute; Vacuum
Signal Output	Analog Voltage; Analog Current; Switch
Notes	CE compliant, prevents contamination buildup, two control relays
Abstract	The MKS Baratron® Type 621C Absolute Pressure Transducer is designed for applications that require a high temperature sensor. In semiconductor processes , a high temperature transducer prevents SHIELDED TRANSMISSION contamination buildup. For example, chloride-based effluents CABLES (ammonia chloride, aluminum chloride) which occur in LPCVD nitride and aluminum etch processes, can condense onto surfaces cooler than 100°C and become sources of particle generation, 4.50 4.50 (114.3) leading to wafer defects. In steam sterilizable ty...

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