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PiezoSteel+™ Vacuum Sensors Data Sheets MKS Instruments, Inc.


Available from: MKS Instruments, Inc.
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PiezoSteel+™
SPECIFICATIONS View Entire Datasheet
Device Category Sensor or Transducer; Controller (optional feature)
Sensor Technology Semiconductor Piezoresistive
Vacuum Range (torr) 3000 to 0.1000
Pressure Measurement Absolute; Vacuum
Display Type Digital Numerical Display (optional feature)
Notes Weight 0.9 lbs, excellent in corrosive environment, made of stainless steel
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