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0.01 Micron Membrane Gas Filter -- 6190 Gas Filtration Elements Data Sheets Matheson Tri-Gas, Inc.

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0.01 Micron Membrane Gas Filter -- 6190

SPECIFICATIONS

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Application / Industry	Semiconductor (optional feature)
Filtration Grade (µm)	0.01 to 0.20
Flow Rate (Gas) (SCFM)	9
Maximum Pressure (psi)	1000
Maximum Temperature (F)	100
Notes	Membrane gas filter, VCR and Swagelok connections, 0.5 sq. ft. filter area

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