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Hybrid Turbomolecular Pump -- ATH 300 Cl High Vacuum Pumps Data Sheets Alcatel Vacuum Products, Inc.

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Hybrid Turbomolecular Pump -- ATH 300 Cl

SPECIFICATIONS

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Configuration	Combination
Ultimate Vacuum (torr)	3.83E-10
Pumping Speed (CFM)	636
UHV / High Vacuum	Turbomolecular; Molecular Drag
Dimensions and Weight	218.5mm x 158mm Diameter
Notes	Incorporates intermediate pumping port flange (DN16 ISO-K) for flexibility

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