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Hybrid Turbomolecular Pump - ATH 31 -- R8 High Vacuum Pumps Data Sheets Alcatel Vacuum Products, Inc.

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Hybrid Turbomolecular Pump - ATH 31 -- R8

SPECIFICATIONS

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Configuration	Combination
Ultimate Vacuum (torr)	7.50E-8
Pumping Speed (CFM)	63.57
UHV / High Vacuum	Turbomolecular; Molecular Drag
Pump Stages	Two Stage
Notes	Incorporates turbomolecular w/ drag stages resulting in high speed pumping

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