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CV™ Compact High Conductance Valve -- CVNL-4F-NCVV Vacuum Valves Data Sheets MKS Instruments, Inc.


Available from: MKS Instruments, Inc.
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CV™ Compact High Conductance Valve -- CVNL-4F-NCVV
SPECIFICATIONS View Entire Datasheet
Type Inline
Port OD (inch) 1.00
Leak Rate (std cc / sec) 1.00E-9
Vacuum / Pressure Range Low or roughing vacuum level (> 1 torr); Low / Medium (HV < 1 torr, >10-3 torr); (HV, < 10-3, >10-8 torr); (UHV,  < 10-8 torr)
Temperature Range (F) -14.80 to 302
Notes The Cv valve is ideally suited for the semiconductor industry or research
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