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Vacuum Research Corporation Data Sheets for Vacuum Valves

Vacuum Research Corporation
Address: 2419 Smallman Street
Pittsburgh, PA 15222
 Contact: Web site
E-mail

Phone:  (412) 261-7630
(800) 426-9340
Fax: (412) 261-7220

Vacuum Valves:

Vacuum valves are used when a vacuum must be maintained in a closed system.

Vacuum Valves: Learn more

Product Name
Notes
Gate Valve -- LPSS-*-ISO, Gate Valve -- LPSS-*-JIS, Gate Valve -- LPWA-*-ISO, Gate Valve -- LPWA-*-JIS, Gate Valve -- OP-63-ISO, Gate Valve -- OP-65-JIS, Gate Valve -- OPSS-63-ISO, Gate Valve -- OPSS-65-JIS 250,000 cycle rotary shaft seal, easy to service, fail safe design
Gate Valve -- OP-*-ANSI 250,000 cycle rotary shaft seal, fail safe design, low temperature bake out
Gate Valve -- OP-*-JIS 250,000 cycle rotary shaft seal, uses standard ISO centering rings
Angle Valve -- AV-*-ISO-k Flanges to match diffusion and cryo pumps, extremely low outgassing rate
Angle Valve -- ALUM-BEL-ANG, Angle Valve -- ALUM-O-ANG, Angle Valve -- SS-BEL-ANG, Inline Valve -- ALUM-BEL-INL, Inline Valve -- ALUM-O-INL, Inline Valve -- SS-BEL-INL Gauge fittings available on either port, spring close or air close failsafe
Gate Valve -- LPSS-*-ANSI, Gate Valve -- LPWA-*-ANSI Long life, fast repair, sealed against positive pressure in both directions
Angle Valve -- 2532 Low profile, over 100,000 cycles without maintenance
Throttlemaster™ Vacuum Gate Valve -- ATM, Throttlemaster™ Vacuum Gate Valve -- STM Manual or closed loop operation, 3 position or downstream control
Gate Valve -- LPSS-*-CON, Gate Valve -- LPWA-*-CON Many port flange neck styles available, limit switch available
Small Gate Valve -- Mini-SS No sliding surfaces to generate particles, high conductance design
Angle Valve -- AV Over 100,000 cycles without maintenance, extremely low outgassing rate
Gate Valve -- END-*-ISO Over 100,000 cycles without maintenance, optional remote position indicator
Rectangular Port Gate Valve -- REB, Rectangular Port Gate Valve -- REQ Port sizes to fit any wafer/display, bolt pattern to fit any tool/chamber
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  • Company Description:
    Vacuum Research Corporation started building vacuum valves in 1953, and vacuum valves are still an important part of the business. In 1988, Charlie Hawk joined VRC and began developing their vacuum gauge product line which now includes Pirani, thermocouple, diaphragm and cold cathode instruments.... (more)